By Hubert Gnaser

The ebook offers an summary on very important features of ion irradiation of surfaces, emphasizing low impression energies. particularly, ion penetration and implantation into solids, disorder construction and amorphization of semiconductors, sputtering of elemental and multicomponent pursuits, and ionization tactics of emitted species are mentioned. It offers a synoptic view of those phenomena that are strongly interrelated by means of an analogous easy tactics, yet are usually defined individually and in diverging terminology. The ebook attempts to bridge this hole, summarizing effects from experiments, desktop simulations and theoretical techniques.

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